TEL Tokyo Electron 3281-000137-11 Interface Board

Product manual:

TEL Tokyo Electron 3281-000137-11 Interface Board
TEL 3281-000137-11 Interface Board is a signal connection and distribution module used inside Tokyo electronic semiconductor equipment,
Commonly used as a communication bridge between control systems and field devices such as sensors, actuators, power modules, etc.
It has the characteristics of high reliability and strong stability, and is suitable for various complex process control scenarios.

1、 Basic functions of the product:
Model: 3281-000137-11

Type: Interface Board

Function: Used to guide, regulate, distribute, and isolate signals between the main control system and external signal sources or actuators.

2、 Application areas:
1. Internal control system of semiconductor manufacturing equipment
Applied in CVD, Etch, ALD, cleaning and other equipment, it is used to connect the main controller and subsystem signals to ensure stable system operation.

2. Wafer handling system
Connect sensors, motor controllers, and photodetectors to achieve signal synchronization and data transmission during precision handling.

3. Gas and vacuum systems
Connect MFC, valves, and pressure sensors to achieve precise control and real-time feedback of gas delivery and vacuum environment.

4. Temperature control and heating system
Manage thermocouple or RTD input signals and connect them to the heating power control unit to achieve precise temperature regulation.

3、 Product features (reference TEL interface board universal design):
High density signal interface, supporting multi-channel analog and digital signal access

Equipped with optocoupler and electrical isolation functions to prevent external interference in the control system

Industrial grade printed circuit board material, suitable for clean rooms and high temperature environments

Standard D-sub, MIL, terminal block and other industrial connection interfaces for quick replacement

Supports multiple voltage and signal levels (TTL, 24V, 0-5V analog, etc.)

Product details picture:

3281-000137-11

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