TEL Tokyo Electron 3281-000146-12 Driver Module

Product manual:

1、 Basic Information
Product model: 3281-000146-12

Product Name: Driver Module

Manufacturer: Tokyo Electron (TEL)

Module category: actuator driver module

Version number: 12th edition (specific revised version)

2、 Main functions
Motor drive: provides control signals and driving force for stepper motors, servo motors, or other actuators

Execution action control: Control the start, stop, speed, and position of the mechanical action of the equipment according to the main control instructions

Signal processing: Processing feedback signals to achieve closed-loop control

Protection function: overcurrent, overvoltage, overheating and other protections to ensure the safety of modules and equipment

3、 Typical application areas
Drive of robotic arms and conveyor mechanisms in semiconductor manufacturing equipment

Rotating platform drive in coating and developing equipment

Gas flow valve or vacuum pump drive inside etching equipment

Execution units for handling systems, lifting platforms, positioning devices, etc

4、 Module features
Highly integrated design, suitable for complex process equipment requirements

Supports multiple control protocols and is compatible with TEL device control architecture

Industrial grade stability, suitable for clean room environment

Version "-12" indicates hardware or firmware upgrade to ensure optimal performance

Product details picture:

3281-000146-12

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