TEL Tokyo Electron 3281-000227-11 processor module

Product manual:

Product model: TEL Tokyo Electron 3281-000227-11
type: Processor Module
Functional positioning: The core control processing unit in semiconductor equipment, used for data calculation, signal scheduling, and equipment process control

1、 Product Function Overview:
3281-000227-11 is an embedded processor module used in high-end semiconductor devices of Tokyo Electron,
As the "central brain" of the system, it is mainly responsible for the execution of device operation logic
Process control, coordination and management between subsystems, and real-time processing of on-site signals.
Usually used in conjunction with input/output modules, communication interface boards, power management modules, etc.

2、 Main application areas:
Core control unit of equipment main control system

Applied to various equipment such as TEL etching, deposition, cleaning, diffusion, etc., executing control programs,
Coordinate and schedule various sub modules such as sensors and actuators.

Embedded control logic processing

Calculation and judgment of key parameters such as built-in process control logic, equipment action timing, temperature/pressure/gas, etc.

Process parameter control and feedback calculation

Real time collection of process parameters (such as chamber temperature, vacuum pressure, gas flow rate),
After processing, output control signals to ensure process accuracy and equipment stability.

Equipment communication management

By communicating with other modules such as I/O interface boards, communication adapters, and upper computers,
Implement system level synchronization and respond to remote control commands.

Human Machine Interface (HMI) linkage control

Support collaborative operation with human-machine interface devices such as touch panels and graphical control terminals,
Provide operational data, alarm information, and process status display.

Remote maintenance and equipment diagnostic support

Capable of recording system operation logs, handling error codes, and performing software and hardware self checks,
Easy for equipment maintenance personnel to diagnose and analyze faults.

Product details picture:

3281-000227-11

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