TEL Tokyo Electron 3380-000130-11 Input/Output Control Module

Product manual:

1、 Basic Information
Product model: 3380-000130-11

Product Name: Input/Output Control Module

Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)

Module category: I/O control module

Version number: -11 (indicating the 11th hardware revision of this model)

2、 Main functions
This module is responsible for the centralized management and control of input and output signals of the equipment, mainly including:

Functional category description
Digital inputs receive switch signals, such as sensor status, button inputs, etc
Digital output control actuators, such as relays, solenoid valves, indicator lights, etc
Some versions of the analog signal interface may support analog input/output for collecting voltage, current, temperature, etc
Signal isolation and buffering prevent signal interference, improve the stability and safety of equipment operation
Communication interface communicates with the main control system, transmits collected signals, and executes control commands

3、 Typical application scenarios
This input-output control module is widely used in various semiconductor manufacturing equipment of TEL, including:

Photolithography pre-processing and post-processing equipment (such as ACT series)

Etching equipment (such as Tactras series)

Sedimentation equipment (such as Trias series)

Wafer handling and automation control system

4、 Module features
High density signal channel design, supporting multiple input and output channels

Good electrical isolation and anti-interference performance

Version "-11" indicates that the hardware has been optimized, resulting in improved compatibility and performance

Closely integrated with TEL control system to ensure accurate and reliable data transmission and control commands

Suitable for industrial environments and clean room use

Product details picture:

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