TEL Tokyo Electron 3381-000113-12 Lighting Control Board

Brand:TEL Tokyo Electron
Model:3381-000113-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3381-000113-12 Lighting Control Board

Product manual:

1. Lighting control of process chamber
This control board is used inside semiconductor equipment, such as exposure machines, etching equipment, or coating and developing machines
Lighting management of chambers or workbenches.

Control the brightness, switch, and lighting quality of the light source to ensure that the process personnel are responsible for maintenance
Reliable lighting conditions are available during maintenance or visual inspection.

2. Visual inspection and calibration support
Provide uniform illumination through standardized lighting before device startup or maintenance,
Cooperate with CCD camera system to perform optical detection, positioning calibration, and fault inspection.

Help improve the accuracy and repeatability of visual inspection systems, and strengthen process control.

3. Visualization of automation operation status
The board can adapt to different working states of the device (standby, running, fault, etc.)
Adjust lighting brightness or operating mode to help operators quickly identify equipment status.

4. Safety warning and status indication
By controlling light sources of different colors or flashing patterns,
As a visual indication in case of equipment failure or alarm status, it provides assistance for rapid response.

5. Energy optimization and reliability improvement
Control the power output of lighting components such as LED or xenon lamps to achieve efficient, stable, and long-lasting lighting configurations.

Ensure that the equipment does not affect the process or increase maintenance difficulty due to lighting failures in a cleanroom environment with millions of units.