TEL Tokyo Electron 381-500242-B Input/Output Module
Brand:TEL Tokyo Electron
Model:381-500242-B
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 381-500242-B Input/Output Module
Product manual:
TEL Tokyo Electron 381-500242-B Input/Output Module
It is one of the core functional components used for collecting and outputting control signals in Tokyo Electron semiconductor manufacturing equipment.
The main function is to manage the signal interaction between various sensors and actuators related to device operation.
The following are detailed technical and application instructions without patterns:
1、 Basic Information
Product model: 381-500242-B
Product Name: I/O Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Module Category: Control System I/O Board (Digital/Analog Input Output)
2、 Core functions
Input signal acquisition
Support the collection of digital or analog signals from limit switches, sensors, photodetectors, vacuum/temperature monitoring equipment, etc;
Real time transmission to the main controller for logical judgment and action triggering.
Output signal control
Output control signals to devices such as solenoid valves, relays, stepper drivers, heaters, etc;
Trigger automated actions (such as opening chamber doors, moving platforms, switching valves, etc.).
Signal isolation and anti-interference
Support electrical isolation design to ensure signal stability of equipment in high EMI environments;
Built in anti reverse and anti overload protection circuits.
System linkage and emergency control
Integrate with the main control system to achieve synchronous control of complex process flows;
Support safety interlock, emergency stop circuit, and status feedback processing.
3、 Typical application scenarios
Etcher equipment
Control gas valves, vacuum chamber doors, RF power supply linkage, monitor gas pressure/temperature and other status.
CVD/ALD system
Output gas path selection signal, input reaction chamber pressure and flow rate monitoring data.
Cleaning system
Control the inflow and outflow of medication, heating plate operation, drainage action, and monitor the liquid level and temperature.
Conveyor System (EFEM/Load Port)
Control the wafer transfer mechanism, alignment system, door lock system, and sensor status feedback.
Product details picture:
381-500242-B
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