TEL Tokyo Electron 381-600196-7 Control Unit

Product manual:

TEL Tokyo Electron 381-600196-7 Control Unit - Product Application Fields
1. Control of exhaust gas treatment system (scrubber)
This control unit is used in the exhaust gas purification system of TEL semiconductor equipment to control the chemical gas treatment process,
Including the start stop and regulation of devices such as pumps, valves, fans, etc., to ensure the effective discharge and purification of process waste gas.

2. Safety guarantee of process environment
By monitoring parameters such as gas flow rate, pressure, and temperature, abnormalities can be detected in a timely manner,
Triggering the safety interlock mechanism to prevent harmful gas leakage is crucial for ensuring the safety of clean rooms and personnel.

3. Integrate with the main control system for operation
This module serves as an I/O interface control board and collaborates with the TEL main control system,
Ensure that the exhaust gas treatment system works synchronously with the main equipment to achieve linkage control and abnormal feedback.

4. Automated operation and maintenance support
Implement functions such as automatic start stop, fault alarm, and status monitoring for the Scrubber system,
Improve the level of system automation and support remote monitoring and maintenance strategy optimization.

5. Environmental compliance and green manufacturing
The control unit helps ensure that exhaust gas treatment complies with environmental regulations,
It is an important component of TEL equipment that complies with international standards such as ISO, RoHS, SEMI, and is widely used in green production processes.

Product details picture:

More related products:

6ES7313-6CF03-0AB0CentralProcessingUnitModule

WINGREEN03ZSTJ1-00-301-RSDigitalquantitycontrolboard

WOODWARD9907-147PLCsparepartsmodule

More product recommendations:

ABB XVC768115 thyristor module

ASEA 57520001-U circuit board

RADISYS 061-01450-0010 Network Adapter