Details
TEL Tokyo Electron 381-600316-3 Driver Board
Product manual:
TEL Tokyo Electron 381-600316-3 Driver Board
It is a key execution control module in Tokyo Electronics (TEL) semiconductor manufacturing equipment,
Mainly responsible for driving and controlling actuators such as motors and valves in equipment,
Realize automated control of precise actions and process flow.
1、 Product Overview
Project Content
Product Name: Driver Board
Product model 381-600316-3
Manufacturer Tokyo Electron Ltd
Functional positioning motor and actuator drive and control
2、 Core functions
Execution mechanism driver
Control the start, stop, speed, and position of stepper motors, servo motors, or DC motors;
Drive switch actuators such as solenoid valves and relays.
Signal conversion and amplification
Amplify the low-level signal output by the control system into the driving current and voltage required by the actuator;
Provide electrical isolation to protect the control system from current surges.
Feedback monitoring
Support sensor signal feedback, monitor drive status and faults, and ensure accurate and reliable actions.
3、 Typical application scenarios
Drive control of various mechanical components in semiconductor equipment,
Such as wafer handling robotic arms, motor drive shafts, pneumatic valve controls, etc.
The key component that executes precise action control in automated process flow.
Product details picture:

381-600316-3
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