TEL Tokyo Electron 381-639006-4 Input/Output Module

Product manual:

Product model: TEL Tokyo Electron 381-639006-4
type: Input/Output Module (I/O Module)
Functional positioning: realizing signal exchange and control between devices and external sensors and actuators

1、 Product Function Overview:
The 381-639006-4 input/output module is a key interface unit designed by Tokyo Electron (TEL) for semiconductor manufacturing equipment.
It is responsible for collecting various input signals (digital and analog) from the equipment site, and outputting the processed control signals to the actuator,
Realize the automation control of equipment process flow, such as valves, pumps, motors, etc.

2、 Main application areas:
Semiconductor process equipment signal interface

Used for etching machines CVD、PVD、 Diffusion furnace, cleaning equipment, etc,
Realize the connection between the equipment control system and on-site sensors and actuators.

Digital and analog signal processing

Supports multi-channel digital input (DI), digital output (DO), analog input (AI)
Simulate output (AO) to achieve process parameter acquisition and control.

Process automation control

Assist the main control processor in implementing valve control, pump regulation, motor drive, and process status monitoring,
Ensure process stability and precision.

Equipment status monitoring and alarm

By collecting input signals, real-time monitoring of equipment operation status and fault alarms can be achieved,
Improve equipment safety and reliability.

Modular system integration

As an important component of the device control architecture, it supports high-speed communication and data exchange with other modules.

Product details picture:

381-639006-4

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