TEL Tokyo Electron 381-639006-5 restriction board

Brand:TEL Tokyo Electron
Model:381-639006-5
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 381-639006-5 restriction board

Product manual:

1、 Basic Information
Product model: 381-639006-5

Product Name: Interlock Board/Limit Board

Manufacturer: Tokyo Electron Ltd

Component Category: Safety Interlocking and Protection Module

Application equipment: widely used in various semiconductor manufacturing equipment of Tokyo Electron,
Especially the etching machine CVD、 Cleaning equipment, etc.

2、 Functional positioning
Safety interlock function

Monitor the status of key components of the equipment (such as door locks, pressure, temperature limits, etc.) to ensure safe operation of the equipment.

When an abnormal or dangerous state is detected, a stop signal is immediately issued to cut off the critical control circuit and prevent accidents from occurring.

Status detection and feedback

Collect and logically judge key sensor signals, and provide feedback to the main controller or alarm system of the equipment.

Prevent unauthorized operations or abnormal working conditions.

Fault protection

Handle emergency stop buttons, emergency shutdown signals, etc., and perform quick power-off or shutdown protection actions.

Implement a safety interlock chain for the equipment to ensure the safety of both humans and equipment.

3、 Application Fields
Semiconductor manufacturing process equipment

Monitor equipment chamber doors, vacuum pump status, gas supply status, heating system limits, etc.

Equipment safety interlock system

As a multiple safety protection link, ensure the safety of equipment operators and process safety.

Emergency protection system

Quickly respond to abnormal events, trigger interlocks, and protect equipment and process environments.