TEL Tokyo Electron 381-639094-4 Digital Input Card

Product manual:

TEL Tokyo Electron 381-639094-4 Digital Input Card
It is an electronic signal acquisition module specifically designed for TEL semiconductor equipment,
Responsible for receiving and processing digital signals from external devices, achieving status monitoring during the process
Equipment interlocking and logical judgment functions.

1、 Basic Information
Product Name: Digital Input Card/Digital Input Module

Product model: 381-639094-4

Manufacturer: Tokyo Electron Ltd. (TEL)

Module type: Digital input signal acquisition board (DI module)

Application scope: TEL automation process equipment such as Etcher, CVD, cleaning, Track, etc

2、 Main functions
signal acquisition

Receive switch signals (ON/OFF) from devices such as switches, sensors, relays, and photodetectors.

logical judgment

Transmit input signals to the main control system (such as PLC or industrial PC) for the judgment of equipment operation logic and process advancement.

Safety interlock support

The input signal can be used as one of the interlocking conditions for device startup, chamber locking, vacuum status confirmation, etc.

Status feedback monitoring

Monitor the actual status of key mechanisms such as door control, air valves, and robotic arms through digital inputs to ensure safe execution of the process.

3、 Typical application areas
This card is widely used in multiple core equipment systems of TEL, including:

Dry etching equipment (Etcher)

Receive gate control and vacuum in place signals, and participate in plasma start interlocking.

CVD/ALD equipment

Receive information on the opening and closing status of the reaction chamber, gas valve status, etc.

Wafer Cleaning Systems

Detect the supply status of chemical solution, pump start signal, and liquid level sensor feedback.

Photoresist processing equipment (Track System)

Receive digital feedback signals such as tray position, wafer loading, and heating module door status.

Product details picture:

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