TEL Tokyo Electron 381-639472-2 Digital Input Card

Product manual:

TEL Tokyo Electron 381-639472-2 Digital Input Card
It is a key module used in TEL semiconductor equipment to collect digital (switch) input signals,
Responsible for receiving switch signals from various parts of the equipment, achieving status monitoring and process control.

1、 Basic Information
Product Name: Digital Input Card

Product model: 381-639472-2

Manufacturer: Tokyo Electron Ltd. (TEL)

Functional category: Digital Input Module (DI Module)

Installation location: Equipment control cabinet, I/O module rack, control system interface

2、 Main functions
Digital signal acquisition

Receive switch signals (0/24V DC) from sensors, buttons, limit switches, relay contacts, etc.

Real time feedback on device status (such as door switch status, mechanical position, alarm signals, etc.).

Status detection and transmission

Transmit the collected digital input signals to the main control system (PLC, embedded controller, etc.) for logic judgment and action triggering.

Interlocking and safety control

Support safety interlock logic to prevent equipment from operating in abnormal states.

anti-interference design

Equipped with optocoupler isolation to enhance the anti-interference ability and system stability of input signals.

3、 Typical application areas
Application device type, signal type, and function
Etcher equipment door lock status, vacuum status feedback, air valve position
CVD/ALD system heater status and flow control switch feedback
Coating and developing equipment (Track) wafer in-situ detection, platform limit switch
Transfer system: Detection of robotic arm position and fixture status

Product details picture:

381-639472-2

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