TEL Tokyo Electron 381-640994-2 Control Unit

Product manual:

1、 Basic Information
Product model: 381-640994-2

Product Name: Control Unit

Manufacturer: Tokyo Electron Limited (TEL)

Component category: Main control or distributed control module

Version number: -2 (representing specific hardware revisions for this control unit)

2、 Main functions
This control unit is one of the core control components in TEL semiconductor equipment, typically responsible for the following tasks:

Functional classification description
The device master controls the operation process and execution status of the device by processing commands from the upper system
Signal coordination management and coordination of data transmission and control instructions for multiple input/output modules
Process logic control: Based on preset process steps, control actions such as startup, heating, vacuum, gas flow, etc. are issued
Communication bridging connects modules such as HMI, upper computer, sensors, and actuators to achieve data exchange
Fault handling detects abnormal states and triggers alarm, shutdown or self-protection mechanisms

3、 Typical application areas
This type of control unit is widely used in TEL's wafer processing equipment, including:

Photolithography pre-processing and post-processing equipment (such as Clean Track ACT series)
Control the action of the developing arm, lifting platform, spraying system, and drying heating unit, etc

CVD/Etch systems (such as Tactras, Trias series)
Manage complex process subsystems such as temperature, vacuum, and gas control circuits

Loading port/Transfer modules
Coordinate the action timing and interlock logic of modules such as robotic arms, chamber doors, and airtight systems

4、 Module features
Highly integrated embedded architecture, suitable for long-term stable operation

Supports multiple industrial communication protocols, such as TEL dedicated bus, CAN, RS-232/485, etc

Strong anti-interference capability and industrial grade reliability design

Hardware revision "-2" version may indicate minor adjustments to pin layout, power requirements, or interface protocols

Product details picture:

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