TEL Tokyo Electron 381-64227-3 Digital Input Card

Brand:TEL Tokyo Electron
Model:381-64227-3
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 381-64227-3 Digital Input Card

Product manual:

1、 Basic Information
Product model: 381-64227-3

Product Name: Digital Input Card

Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)

Card type: Digital input module/DI board

Version number: -3 (indicating the third revision or hardware version of the card)

2、 Main functions
This card is used to receive and process switch signals (DI) from field devices, and is one of the key components for state detection and event triggering in TEL control systems.

Functional category description
Digital input collects switch status signals of receiving buttons, limit switches, dry contact sensors, etc
Status reporting feeds back the input status to the main controller for action judgment and process logic execution

3、 Application Fields
This card is mainly used for digital status monitoring and interlock control systems in various semiconductor manufacturing equipment of TEL, and is widely used in:

ACT series (lithography auxiliary equipment)

Monitor the status of the chamber door, platform positioning, wafer presence, vacuum status, and other switch inputs

Tactras series (etching equipment)

Detect the status of gas valves, safety door switches, and cooling water pressure relays

Trias series (sedimentation equipment)

Used for safety interlock signal acquisition and electromagnetic action feedback signal access in sedimentation process steps

EFEM/Transfer/Load Port module

Determine whether the loading unit is in place, whether the cartridge door is closed, and whether the robotic arm is in place