TEL Tokyo Electron 381-642664-1 Analog Input Electronic Module

Product manual:

1、 Basic Information
Product model: 381-642664-1

Product Name: Analog Input Electronic Module

Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)

Module type: Analog signal acquisition input unit

Revision number: -1 (indicating the initial or first edition of this module)

2、 Main functions

Functional category description
Analog signal acquisition and reception of 0-10V, 4-20mA, RTD, thermocouple and other types of analog signals
Data conversion converts analog signals into system recognizable digital data (usually through ADC)
Real time monitoring of physical quantities such as temperature, pressure, flow rate, voltage, and current through process monitoring
Signal isolation has electrical isolation function to prevent noise interference and ground current from affecting system stability
Communication support enables data communication with the main controller (PLC, process computing unit) to achieve closed-loop control

3、 Typical application scenarios
This module is widely used in various precision measurement processes in TEL semiconductor equipment, with common applications including:

Photolithography pre-processing and post-processing system

Collect analog signals such as heating platform temperature, liquid flow rate, and environmental pressure

CVD/PVD thin film deposition equipment

Monitor heating chamber temperature, reaction gas flow rate, cooling system temperature difference, etc

Etching Equipment

Real time measurement of process parameters such as temperature, current, voltage, and gas density inside the cavity

Wafer handling system

Collect parameters such as pneumatic component pressure and motor feedback current to improve handling accuracy and safety

4、 Module features
High precision and fast response, suitable for semiconductor manufacturing processes with high real-time requirements

Multi channel input design, supporting simultaneous acquisition of multiple analog parameters

Onboard isolation and lightning protection design to enhance stability and lifespan

Version "-1" represents the early standard version, suitable for more stable device system platforms

TEL dedicated communication interface ensures seamless integration with the main control system

Product details picture:

381-642664-1

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