TEL Tokyo Electron 3884-2000170-16 Printed Circuit Board

Product manual:

TEL Tokyo Electron 3884-2000170-16 Printed Circuit Board (PCB)
It is a customized electronic module used in TEL semiconductor manufacturing equipment,
Mainly responsible for signal processing, control logic, communication interfaces, or power distribution tasks of a certain subsystem of the equipment.

1、 Basic Information
Product Name: Printed Circuit Board (Control Function Board)

Product model: 3884-200170-16

Manufacturer: Tokyo Electron Ltd. (TEL)

Module classification: Embedded Function Control Board/I/O Interface Board/Logic Processing Circuit Board (depending on the device)

Application system: may belong to submodules in Etch, CVD, Track, or Transfer systems

2、 Function description (depending on actual device configuration)

Signal Relay and Interface Processing

Provide logical relay between the upper controller (such as the main control CPU) and the underlying sensors and actuators

Perform signal level conversion (TTL) ↔ RS232/485, etc.)

Process parameter adjustment and control logic execution

Participate in controlling the working logic of modules such as heating, vacuum, power, valves, motors, etc

Possible built-in programmable logic devices such as MCU and FPGA

Equipment status monitoring and communication

Implement bus communication with other control boards (CAN, TEL dedicated bus, I ² C, SPI, etc.)

Provide auxiliary functions such as fault detection, status light control, voltage monitoring, etc

Power distribution or protection circuit function

Allocate stable voltage to submodules

Provide protection against overvoltage, overcurrent, surge, etc

3、 Typical application scenarios (speculated)
Potential functional modules of the device type
Etcher system RF system auxiliary circuit, vacuum valve logic processing board
CVD/ALD system heating circuit feedback board, gas flow path switch relay board
Track equipment for wafer positioning, heating unit monitoring, and motor operation control
I/O interface board and gripper sensor status logic board of the handling system robotic arm

Product details picture:

3884-200170-16

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