TEL Tokyo Electron 3884-200219-31 CPU module

Product manual:

TEL Tokyo Electron 3884-200219-31 CPU module
It is a core control unit used in semiconductor manufacturing equipment,
Mainly responsible for system computation, signal processing, equipment control and other functions, it belongs to the brain part of the equipment.
This module is usually integrated into the main control framework of TEL, used to coordinate and manage various subsystems
(such as gas control, temperature control, motion control, etc.).

1、 Basic Product Information
Model: 3884-200219-31

Product Name: CPU Module/Central Processing Module

Manufacturer: Tokyo Electron (TEL)

Adaptation platform: TEL dedicated semiconductor equipment, such as deposition equipment (CVD), etching machines, cleaning equipment, etc

2、 Function and Function
Central Processing Unit

Manage all device sub modules, such as gas flow control, power system, I/O interfaces, user interfaces, etc.

Run device control software to achieve sequential logic and real-time task scheduling.

I/O signal management

Communicate with peripheral devices through buses such as VME, PCI, PXI, etc.

Receive sensor signals and control actuator actions.

Communication with Human Machine Interface (HMI)

Provide interface support for status display, alarm, parameter settings, etc.

Running the operating system

May run embedded real-time operating systems (such as VxWorks, QNX, or TEL custom RTOS), supporting stable control performance.

3、 Typical application areas
Thin film deposition equipment (CVD/PVD)

Control the reaction temperature, gas flow rate, and vacuum environment to ensure deposition uniformity.

Plasma etching equipment (Etchers)

Real time monitoring of cavity status and dynamic adjustment of etching parameters.

Cleaning equipment (Wet Bench)

Manage liquid chemicals, pump valve switching, tank temperature control, etc.

Measurement and detection module

Coordinate functions such as image processing, signal acquisition, and measurement data transmission.

Product details picture:

3884-200219-31

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