TEL Tokyo Electron 3D80-000158-V3 Interface Box

Product manual:

3D80-000158-V3 interface box
Manufacturer: Tokyo Electron Ltd. (TEL)
Category: Interface Box/Signal Junction Box

1、 Function Overview
The 3D80-000158-V3 interface box is a module used for signal concentration and distribution in TEL semiconductor equipment. Its main functions include:

As a signal relay hub, it connects the main control board with multiple peripheral devices

Collect and route various signal lines, such as digital/analog input/output, communication cables, power lines, etc

Implement electrical connection isolation and protection between internal modules of the system

Improve wiring cleanliness and modular management efficiency

2、 Typical application areas
This interface box is mainly used in the following scenarios in TEL devices:

1. Wafer Transfer Module/EFEM
Summarize signals from robotic arms, lifting platforms, access control sensors, and encoders

Connect servo drive, power supply, position sensor and other devices

2. Gas control and valve module
Connect MFC, solenoid valve, pressure sensor, and provide standard signal interface

Support centralized wiring, convenient maintenance and replacement

3. Loadlock or vacuum chamber control area
Manage peripheral device signals such as gate drivers, vacuum gauges, solenoid valves, etc

Realize electrical isolation and safe wiring of multiple signals

4. Tool communication/control box auxiliary unit
Provide communication interfaces with the upper control system and other I/O modules

As part of a distributed control system, connect device modules to each other

Product details picture:

3D80-000158-V3

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