TEL Tokyo Electron 3D80-000259-15 Controller Rack

Brand:TEL Tokyo Electron
Model:3D80-000259-15
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3D80-000259-15 Controller Rack

Product manual:

Product Name: 3D80-000259-15 Controller Rack
Manufacturer: Tokyo Electron Ltd
Product Type: Controller Rack/Module Chassis

1、 Product Overview
The 3D80-000259-15 controller rack is from Tokyo Electron
A standardized rack structure component used in semiconductor equipment for installing and centrally managing multiple control modules, circuit boards, power units, and other components.
This rack provides a unified physical support, electrical interface, and signal distribution foundation to ensure the orderly structure and reliable operation of the control system.

2、 Core functions
Modular installation platform

Provide standard slots or fixed positions for installing functional units such as control boards, I/O modules, power cards, communication interfaces, etc.

Centralized power supply and signal distribution

Internally integrated backplane or wiring board, used for unified power supply, data communication, and signal relay.

Structural support and protection

Made of high-strength metal materials, suitable for clean rooms and industrial environments, with certain seismic and electromagnetic interference resistance capabilities.

Thermal management support

Supporting air cooling, heat conduction, or natural convection heat dissipation methods is beneficial for the stable operation of electronic modules inside the machine.

3、 Typical application system
This controller rack is suitable for the main control and subsystem control platforms in various semiconductor devices of Tokyo Electron, such as:

Etcher main control area

CVD/PVD thin film deposition equipment sub control unit

Handling control systems (EFEM, robots Loadport）

Vacuum chamber control subsystem, power drive control area