TEL Tokyo Electron 3D80-000259-16 Controller Module

Product manual:

1、 Basic Information
Product model: 3D80-000259-16

Product Name: Controller Module

Manufacturer: Tokyo Electron Ltd

Module type: dedicated control logic board/embedded controller

Applicable equipment: Semiconductor manufacturing equipment used in TEL, such as etchers, CVD systems, wafer processing platforms, etc.

2、 Functional positioning
Process unit control core

Manage all control logic of a subsystem, such as gas flow control, vacuum pump operation, temperature control module drive, etc.

Data collection and control output

Receive inputs from sensors (temperature, pressure, gas flow, etc.) and generate control output signals to actuators (valves, pumps, fans, etc.).

System state management and security protection

Monitor equipment status, perform safety functions such as interlocking control, alarm response, and exception handling logic.

Communicate with the main system

Exchange data with the main control board or human-machine interface through TEL internal communication protocol or industrial bus (such as RS-485, CAN).

3、 Application Fields
CVD, Etch, Ashing, Coach/Developer and other process equipment subsystems

Gas Ratio Control Unit (GDU)

Temperature control module (Heater/Chiller)

Wafer Transfer/Load Port Control System

Control of auxiliary functions of equipment, such as extraction/exhaust, drying, cleaning and other process stages

4、 Technical characteristics (typical)
Industrial grade high reliability embedded processor

Multi channel analog/digital input/output support

Support hot swappable or rack mounted installation (depending on system architecture)

Built in EEPROM/Flash storage for configuring parameters and controlling logic storage

High anti-interference ability, suitable for clean rooms and vacuum environments

The "-16" in the module number indicates a specific version revision of hardware or firmware

Product details picture:

3D80-000259-16

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