TEL Tokyo Electron 3D81-000018 Motor Distribution Board
Brand:TEL Tokyo Electron
Model:3D81-000018
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 3D81-000018 Motor Distribution Board
Product manual:
Introduction to TEL Tokyo Electron 3D81-000018 Motor Distribution Board
Product definition:
3D81-000018 is a motor distribution board in Tokyo Electron (TEL) equipment,
Mainly used for centralized management of power and control signal distribution for multiple motors, it is one of the core components in motion control systems.
Main functions:
The control signals of future autonomous controllers (such as PLCs or motion control cards)
The power signal is distributed to multiple motor channels to achieve coordinated driving and zone management of multiple motors.
Applicable device types:
Wafer processing equipment suitable for TEL, such as CVD (chemical vapor deposition), Etch (dry etching), Coat/Developer (coating development)
Load Port, EFEM automation module, etc.
Supported motor types:
stepping motor
servo motor
DC/brushless motor
The board may integrate motor drive interfaces or work in conjunction with external drivers.
Product features:
Multi channel output, supporting simultaneous connection of multiple motors
Equipped with overcurrent protection, fuses, control relays and other components
Can receive input signals such as position feedback and limit switches
Clear wiring, equipped with status indicator lights for easy debugging and maintenance
Installation location:
Generally located in the control module area and motion control subsystem inside the device,
Close to the actuator or motor body to shorten the cable path and reduce interference.
Typical application scenarios:
Multi axis control of wafer handling robotic arm
Lifting platform or alignment mechanism
Coordinated control of motors for rotating, loading/unloading devices
Motor management of mask moving and clamping mechanism
Product details picture:
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