TEL Tokyo Electron 3D81-000036-11 Sensor Module

Brand:TEL Tokyo Electron
Model:3D81-000036-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3D81-000036-11 Sensor Module

Product manual:

Introduction to TEL Tokyo Electron 3D81-000036-11 Sensor Module
Product definition:
3D81-000036-11 is a sensor module used in Tokyo Electron (TEL) semiconductor equipment,
Responsible for collecting signals of key physical quantities (such as temperature, pressure, position, etc.) inside the equipment,
And convert it into an electrical signal for the control system to process.

Main functions:

Receive and convert various sensor signals (analog or digital)

Preprocess signals (filtering, amplifying, converting) to improve signal quality

Transfer sensor data to the main controller or data acquisition system

Applicable device types:
Widely used in TEL wafer manufacturing equipment,
Such as CVD, Etch, Clean Track, ALD systems, etc., used for equipment status monitoring and process parameter control.

Supported sensor types:

Temperature sensors (thermocouples, RTDs)

Pressure sensor

Displacement sensor

Gas flow sensor

Other environmental and process monitoring sensors

Product features:

High precision signal acquisition and conversion

Anti electromagnetic interference design, suitable for clean room environment

Multi channel input, supporting multiple sensors to be connected simultaneously

Modular design for easy replacement and maintenance

Installation location:
Usually installed in the equipment control cabinet or sensor interface area, it is directly connected to various sensors through connecting wires.

Typical application scenarios:

Equipment environmental temperature and pressure monitoring

Real time collection of process parameters

Position detection and mechanical status monitoring

Warning and fault diagnosis support