TEL Tokyo Electron 3D81-000037-11 Sensor Module

Product manual:

The Tokyo Electron (TEL) model 3D81-000037-11 sensor module is commonly used for sensing and detection functions in semiconductor manufacturing equipment.
The following is a summary of typical product application areas for this sensor module:

TEL Tokyo Electron 3D81-000037-11 Sensor Module Product Application Fields
Semiconductor Manufacturing Equipment

Applied in various wafer processing equipment of TEL, such as Etcher, CVD/PVD, cleaning machine, etc.

The sensor module is used for real-time monitoring of process parameters, ensuring stable equipment status, and improving machining accuracy and yield.

Equipment Automation and Control

As a key sensing input device, it cooperates with the control system to achieve automated control of the equipment.

Monitor key process parameters such as temperature, pressure, position, and flow rate to ensure that equipment operation meets set standards.

Improve the safety of equipment operation and prevent unexpected shutdowns.

Equipment maintenance and diagnosis

Sensor data is used for equipment health monitoring and preventive maintenance, reducing equipment downtime.

Support remote monitoring and fault diagnosis to improve maintenance efficiency.

Product details picture:

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