TEL Tokyo Electron 3D81-000039-V1 Controller Board

Brand:TEL Tokyo Electron
Model:3D81-000039-V1
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3D81-000039-V1 Controller Board

Product manual:

Product model: TEL Tokyo Electron 3D81-000039-V1
type: Controller Board
Functional positioning: The core control module in semiconductor manufacturing equipment, responsible for executing equipment logic control and signal management

1、 Product Function Overview:
3D81-000039-V1 controller board
It is a highly integrated control module developed by Tokyo Electron (TEL) for semiconductor devices.
This board is mainly responsible for processing device action instructions, signal acquisition and distribution
The coordination and communication between process management and subsystems are important components of equipment automation control systems.

2、 Main application areas:
Main control system for semiconductor manufacturing equipment

Used in etching machines, deposition equipment, cleaning machines, and diffusion furnaces to control various actuators such as valves
Electromagnetic valves, motors, and sensors enable precise process operations.

Equipment signal acquisition and processing

Collect digital and analog input signals, process them, and provide feedback control instructions,
Ensure real-time adjustment of process parameters and stable operation of equipment.

Multi module communication coordination

As a communication bridge between various sub modules within the device, it enables data exchange and synchronization of operational status,
Support interface communication with the upper control system.

Process flow logic execution

Built in process logic program, realizing equipment action sequence control,
Support automated execution of complex process steps.

Equipment operation monitoring and safety protection

Equipped with fault detection, self diagnosis, and alarm functions, ensuring safe equipment operation and rapid fault response.