TEL Tokyo Electron 3D81-00004-15 Sensor Module
Brand:TEL Tokyo Electron
Model:3D81-00004-15
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 3D81-00004-15 Sensor Module
Product manual:
TEL Tokyo Electron 3D81-00004-15 Sensor Module
It is a key electronic module in Tokyo Electron semiconductor equipment,
Used for collecting and processing various sensor signals in equipment, supporting precise monitoring and feedback of equipment process parameters.
1、 Basic Information
Product Name: Sensor Module
Model: 3D81-00004-15
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: Sensor signal acquisition and processing module
Application areas: Widely used in semiconductor manufacturing equipment such as etching, deposition, cleaning, and handling systems
2、 Main functions
Multi type sensor signal acquisition
Receive analog signals such as temperature, pressure, flow rate, vacuum degree, etc;
Support digital sensor signal input.
Signal conditioning and conversion
Filter, amplify, and convert sensor signals to ensure accurate and stable data.
Data transmission and feedback
Transmit the processed signal to the main control system for process control and equipment status monitoring.
Abnormal detection and alarm linkage
Support over limit alarm function to ensure safe operation of equipment.
3、 Typical application areas
Etching equipment: Monitor gas pressure, temperature, and plasma parameters inside the chamber.
CVD/ALD deposition equipment: monitors chamber temperature, gas flow, and chemical gas concentration.
Wafer cleaning system: detects chemical concentration, liquid level, and pump status.
Handling machinery: Sensor status monitoring to ensure the accuracy and safety of robotic arm movements.
Product details picture:

3D81-00004-15
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