TEL Tokyo Electron 3D81-000040-12 processor module

Brand:TEL Tokyo Electron
Model:3D81-000040-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3D81-000040-12 processor module

Product manual:

Tokyo Electron 3D81-000040-12 Processor Module
It is a core computing and control unit integrated into TEL semiconductor equipment,
Mainly used for executing equipment process control logic, communication protocol processing, data acquisition and response,
It is one of the "main brain" components in system architecture. This module is commonly used in the control framework of TEL's etching (Etch), CVD, cleaning, wafer handling and other equipment,
Plays a crucial role in coordinating the operation of various subsystems.

1、 Basic Information
Product model: 3D81-000040-12

Product Name: Processor Board/CPU Module

Manufacturer: Tokyo Electron Ltd. (TEL)

Installation method: Control backplane plug-in card/modular rack structure

Positioning function: Process control host/embedded industrial CPU module

2、 Main functions
Central Processing and Control

Execute the preset device running logic program;

Process all data inputs from I/O boards, sensor modules, and communication interfaces;

Manage the execution of output actions, such as valve opening, temperature control, and sequence control during operation.

Communication coordination

As the main control node of the internal control bus of the device, it performs high-speed communication with other control boards (such as I/O boards, communication modules, and digital cards);

Provide Ethernet, serial port (RS232/RS485), CAN or TEL dedicated bus support.

Data processing and monitoring

Real time collection, processing, and recording of key operating parameters of equipment;

Send operational status and data reports to the HMI display system or MES factory system.

Interlocking and Fault Response

Manage safety interlock logic, handle critical logic such as abnormal shutdown, door opening protection, and abnormal air pressure;

Support automatic diagnosis and fault code output.