TEL Tokyo Electron 3D81-000040-V2 processor module

Brand:TEL Tokyo Electron
Model:3D81-000040-V2
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3D81-000040-V2 processor module

Product manual:

product name
TEL Tokyo Electron 3D81-000040-V2 processor module
Product Type: Control Processing Module/Processor Board
Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Introduction

Manage and control the operational logic and action flow of equipment

Real time collection of sensor data and making logical judgments

Start, stop, and schedule equipment submodules (such as heaters, valves, vacuum pumps, robotic arms, etc.)

As the main control CPU board or embedded system core, running embedded operating systems or customized firmware

Support data communication with HMI (Human Machine Interface) or remote monitoring system

2、 Typical application areas
1. Etching Systems for wafer etching equipment

Control plasma generation, power regulation, etching time, and gas flow rate inside the vacuum chamber

Realize precise control and feedback adjustment of process parameters

2. Chemical vapor deposition system (CVD/ALD)

Manage key variables such as sedimentation temperature, gas ratio, reaction time, etc

Ensure that the sedimentation thickness and uniformity meet the process requirements

3. Wafer Handling Systems

Control the actions of robotic arms, tracks, elevators, Loadlock doors, etc

Realize efficient and high-precision wafer handling and docking

4. Lithography and cleaning equipment

Responsible for controlling actions such as light source control, exposure alignment, and focusing in lithography equipment

Control the execution units such as nozzles, fluid pressure, and motor operation in the cleaning system

3、 Product technical characteristics (inferred from common TEL processor modules)
Built in industrial grade embedded CPU, such as PowerPC, ARM, or x86 architecture

Support real-time operating system (RTOS) or dedicated firmware

Multi channel I/O interface (for sensor/actuator connections)

Communication interface: RS-232/485, CAN, Ethernet, TEL dedicated bus

High stability, anti-interference design, suitable for clean room equipment environment