TEL Tokyo Electron 3D81-000044-V3 processor module

Product manual:

TEL Tokyo Electron 3D81-000044-V3 processor module
It is a key control and data processing component in Tokyo Electron semiconductor manufacturing equipment,
Usually used as the main control core or distributed intelligent control node of the entire system.
This module has high computing power, industrial grade stability, and multiple communication interfaces,
Adapt to real-time control and computing requirements in various advanced TEL devices.

1、 Basic Product Information
Product model: 3D81-000044-V3

Product Name: Processor Module

System: TEL Semiconductor Manufacturing Equipment Control Platform

Functional positioning: Embedded control computing module/main control or sub control unit

2、 Core functions and roles
Detailed description of functional categories
The main control logic of the equipment handles the execution of process flow control logic, action sequence arrangement, and status management.
Real time data collection and processing of sensor signals (temperature, pressure, gas flow, etc.) and response.
Communication coordination and communication with upper level systems (such as HMI, MES) and other control boards. Supports multiple protocols (such as RS-232, Ethernet, CAN).
Fault detection and alarm provide equipment operation monitoring, fault self diagnosis, and abnormal state alarm functions.
Real time multitasking control simultaneously coordinates the work of multiple subsystems, such as heating systems, vacuum systems, handling systems, etc.

3、 Applicable equipment system (example)
The 3D81-000044-V3 processor module is widely integrated into the following TEL equipment systems:

Possible uses of system name
TEL Unity ™ II CVD controlled thin film deposition chamber process and temperature control system.
TEL Clean Track ™ The series is used for motion control in wafer processing systems such as development and cleaning.

Product details picture:

3D81-000044-V3

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