TEL Tokyo Electron 3D81-000045-V2 processor module

Brand:TEL Tokyo Electron
Model:3D81-000045-V2
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3D81-000045-V2 processor module

Product manual:

The Tokyo Electron (TEL) model 3D81-000045-V2 processor module is mainly used in its semiconductor manufacturing equipment,
Especially for controlling and coordinating key internal functions of equipment. The following are typical product application areas for this processor module:

TEL Tokyo Electron 3D81-000045-V2 processor module product application areas
Control of semiconductor etching equipment

As the core processing unit of etching systems such as TEL T-3044SS etching machine,
Responsible for executing process procedures, adjusting parameters, and coordinating equipment control.

Real time monitoring and control of various process variables during the etching process
(such as gas flow rate, pressure, power, etc.) to ensure etching accuracy and process consistency.

Equipment automation system integration

By coordinating with sensor modules, interface modules, and power modules,
Realize the overall automation control of the equipment.

Processing multi-channel data, supporting high-speed calculation and feedback adjustment of process parameters.

Process data processing and communication

Responsible for collecting and processing equipment sensor data, executing process logic judgments, and improving equipment operational efficiency.

Support communication with upper control systems (such as factory MES systems) for convenient process monitoring and remote management.

Equipment maintenance and diagnosis

Through real-time monitoring and data processing, it helps to quickly locate equipment failures and anomalies, and supports preventive maintenance.

Easy modular replacement, reducing equipment maintenance costs and downtime.

Integrated System Control in Semiconductor Manufacturing

As a key computing and control unit in the overall semiconductor production line equipment, it ensures equipment coordination and process stability.

Suitable for high-precision and batch semiconductor manufacturing environments.