TEL Tokyo Electron 3D81-000061-V1 motor unit module

Product manual:

Introduction to TEL Tokyo Electron 3D81-000061-V1 Motor Unit Module
Product definition:
3D81-000061-V1 is a motor unit module used for Tokyo Electron semiconductor equipment,
Used to drive, control, and monitor the motor actions of actuators (such as slide tables, rotating platforms, robotic arms, etc.) in equipment.

Main functions:
Control the operating parameters of the motor, such as start stop, speed, direction, position, etc,
Simultaneously receiving encoder or position feedback signals to achieve closed-loop control, ensuring precise and reliable mechanical action.

Applicable device types:
Widely used in TEL's wafer processing equipment such as CVD, Etch, ALD, Coater/Developer, etc,
Responsible for automated control of wafer handling, alignment, loading/unloading, and other related actions.

Control support content:

Stepper motor or servo motor control

PWM or current control output

Encoder signal input interface

Motor braking and emergency stop protection function

Product features:

Fast response speed and high control accuracy

Multi channel output, supporting multi motor linkage control

Onboard diagnostic functions (such as overload and position offset detection)

Standardization of interfaces for easy integration and replacement

Installation location:
Generally installed inside equipment control cabinets, motor drive areas, or motion subsystem modules,
Connect to the main controller and motor body through signal lines.

Typical application scenarios:

Wafer lifting mechanism control

Rotation/extension action of the handling robotic arm

Precise adjustment of mask or wafer alignment platform

Rotating platform control in adhesive developing equipment

Product details picture:

3D81-000061-V1

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