TEL Tokyo Electron 3D81-000063-V5 Circuit Board

Brand:TEL Tokyo Electron
Model:3D81-000063-V5
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

TEL Tokyo Electron 3D81-000063-V5 Circuit Board

Product manual:

Product Name:
TEL Tokyo Electron 3D81-000063-V5 Circuit Board
（Printed Circuit Board）

Product Function Introduction:
This circuit board is a specialized functional board in Tokyo Electron (TEL) semiconductor manufacturing equipment,
Undertake critical signal processing, logic control, and interface connection tasks within the equipment. Its functional features may include:

Signal transmission and interface management between control system submodules

Connect sensors, drivers, and actuators to achieve automatic control

Allocate and execute instructions from the main controller or PLC

Support device status feedback and operation parameter collection

Main application areas:
1. Core components inside the equipment control system
Used within the main control system or subsystem of a device to coordinate signal interaction between the executing mechanism, I/O modules, and the main controller

Implement logical control of action processes, such as chamber opening and closing, wafer movement, vacuum control, etc

2. Wafer handling and positioning module
Manage the connection of components such as motor control, solenoid valves, sensors, etc

Ensure accuracy and reliability during wafer handling

3. Vacuum processing system
May be used in subsystems such as gas control, pressure monitoring, or valve actuation within vacuum chambers

Adapt to devices such as Mass Flow Controllers (MFCs) and vacuum sensors

4. Human machine interface and communication connection
Serve as the data transmission medium between the human-computer interaction panel and the main system

May include communication interfaces (such as RS232, CAN, Ethernet) for remote monitoring or system integration