TEL Tokyo Electron 3D81-000065-V1 Controller

Product manual:

TEL Tokyo Electron 3D81-000065-V1 Controller Module - Product Application Fields
1. Control system for semiconductor etching equipment
This controller module is mainly used for etching equipment such as TEL's T-3044SS,
Undertake the power supply and control functions in the entire system, ensuring the stable operation of key processes such as plasma etching.

2. Power Supply Control
As a 'PS Controller', this module is responsible for managing multiple components of the device
The power supply of devices such as RF power supplies, valves, gas control units, etc. is precisely adjusted to meet the requirements of different process steps.

3. Communication and interface integration
This module also serves as an interface board for data communication between the main control system and peripheral modules,
Supporting signal synchronization, data acquisition, and response control, it is a key interface for system linkage operation.

4. Fault detection and protection mechanism
Equipped with basic power monitoring and anomaly detection functions, it can monitor the output status in real-time,
And issue an alarm or automatically disconnect in case of abnormal voltage or current to ensure the safe operation of the equipment.

5. Equipment maintenance and replacement applications
During equipment maintenance, replacement of aging components, or system upgrades,
This module can be used as a standard replacement to quickly restore equipment functionality and is one of the commonly used spare parts for on-site maintenance of TEL equipment.

Product details picture:

3D81-000065-V1

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