TEL Tokyo Electron 3M10-151466-11 Controller Component

Product manual:

TEL Tokyo Electron 3M10-151466-11 Controller Component
（Controller Assembly）

Product Function Introduction:
The controller component is a modular control core unit used by TEL (Tokyo Electron) in semiconductor equipment,
Integrated with the main control circuit, communication interface, and execution signal logic, it undertakes the tasks of instruction processing and device action control during the operation of the equipment.

Its typical functions include:

Manage the control process of subsystems such as wafer transfer, process handling, vacuum operation, etc

Real time collection of sensor inputs (such as temperature, pressure, position) and making logical judgments

Execution devices such as drive motors, valves, heating units, etc

High speed communication and status synchronization with the main control platform (such as SBC or PLC)

Provide an integrated structure of interface boards, relays, power modules, and other components for easy installation and maintenance

Possible integrated functional modules:
Microcontrollers or industrial CPUs

Digital input/output (DI/DO) interface

Analog signal acquisition (AI)

Communication modules (such as CAN, RS-232/485, Ethernet)

Fault detection and alarm circuit

EMI/ESD electrical protection structure

Main application areas:
1. Core control of wafer processing equipment
Control the handling and alignment of wafers in EFEM, Load Port, and Transfer Module

Manage the collaborative actions of lifting platforms, clamping units, cylinders, and other mechanisms

2. CVD/PVD/Etcher process module
Control the vacuum system, heating device, gas valve, etc. inside the processing chamber

Implement closed-loop control of process parameters (temperature, time, gas flow rate, etc.)

3. Automated process coordination and equipment interlocking
Manage the overall machine status, interlock logic, abnormal shutdown, and protection actions

Support automatic reset, process management, and module level task execution

4. Device communication and data management
Integrate with the upper system or factory manufacturing execution system (MES)

Provide functions such as running logs, fault reports, parameter downloads, and remote upgrades

Product details picture:

3M10-151466-11

More related products:

GE TBC4340F14G Circuit Protector

GE TB43225AF14 Circuit Breaker

WOODWARD 8273-140 Speed Controller

More product recommendations:

HONEYWELL TK-FTEB01 51309512-175 Bridge

RADISYS 61-0159-03 CPU circuit board

RADISYS 61-0158-04 CPU Control Card