TEL Tokyo Electron 3M10-151466-11 Controller Component
Brand:TEL Tokyo Electron
Model:3M10-151466-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 3M10-151466-11 Controller Component
Product manual:
TEL Tokyo Electron 3M10-151466-11 Controller Component
(Controller Assembly)
Product Function Introduction:
The controller component is a modular control core unit used by TEL (Tokyo Electron) in semiconductor equipment,
Integrated with the main control circuit, communication interface, and execution signal logic, it undertakes the tasks of instruction processing and device action control during the operation of the equipment.
Its typical functions include:
Manage the control process of subsystems such as wafer transfer, process handling, vacuum operation, etc
Real time collection of sensor inputs (such as temperature, pressure, position) and making logical judgments
Execution devices such as drive motors, valves, heating units, etc
High speed communication and status synchronization with the main control platform (such as SBC or PLC)
Provide an integrated structure of interface boards, relays, power modules, and other components for easy installation and maintenance
Possible integrated functional modules:
Microcontrollers or industrial CPUs
Digital input/output (DI/DO) interface
Analog signal acquisition (AI)
Communication modules (such as CAN, RS-232/485, Ethernet)
Fault detection and alarm circuit
EMI/ESD electrical protection structure
Main application areas:
1. Core control of wafer processing equipment
Control the handling and alignment of wafers in EFEM, Load Port, and Transfer Module
Manage the collaborative actions of lifting platforms, clamping units, cylinders, and other mechanisms
2. CVD/PVD/Etcher process module
Control the vacuum system, heating device, gas valve, etc. inside the processing chamber
Implement closed-loop control of process parameters (temperature, time, gas flow rate, etc.)
3. Automated process coordination and equipment interlocking
Manage the overall machine status, interlock logic, abnormal shutdown, and protection actions
Support automatic reset, process management, and module level task execution
4. Device communication and data management
Integrate with the upper system or factory manufacturing execution system (MES)
Provide functions such as running logs, fault reports, parameter downloads, and remote upgrades
Product details picture:

3M10-151466-11
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