TEL Tokyo Electron 3M80-001582-14 Circuit Board

Product manual:

Product Name:
TEL Tokyo Electron 3M80-001582-14 Circuit Board

Product application areas:
Semiconductor manufacturing equipment control system
This circuit board is commonly used as an I/O interface module in control systems and is widely used in Tokyo Electron's Trias series devices,
Including process equipment such as CVD (chemical vapor deposition) and ALD (atomic layer deposition),
Used to coordinate signal interaction between the controller and the process chamber.

Multi channel input/output interface management
Used to connect field devices such as sensors, actuators, air valves, temperature controllers, electromagnetic control modules, etc,
Realize signal acquisition and distribution, support closed-loop control and state feedback.

Collaborative control of equipment process modules
Can collaborate with the main control unit to achieve control over key process parameters
Precise control of temperature, pressure, gas flow rate, etc. can help improve process consistency and production line yield.

Modular system integration application
As part of the SW300B/AIO2 control unit, the 3M80-001582-14 circuit board supports modular structure,
Facilitating rapid deployment, replacement, and upgrade of equipment, improving maintenance efficiency and system scalability.

Equipment operation and remote diagnostic support
Can provide equipment operation data collection function for fault location
The warning mechanism and remote operation and maintenance provide interface support to enhance the reliability and visibility of equipment operation.

The data communication center of complex process equipment
In highly automated semiconductor manufacturing equipment, it plays the role of a signal coordination hub,
Ensure that data from different subsystems can be transmitted and responded to synchronously, efficiently, and securely.

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