TEL Tokyo Electron 3M80-001582-16 Interface Module

Product manual:

The TEL Tokyo Electron 3M80-001582-16 interface module is a key hardware module used in Tokyo Electron semiconductor equipment to connect and manage signals from different control units or peripheral devices. It undertakes the tasks of signal interface conversion, distribution, and transmission within the device, ensuring the smooth execution of the process flow and stable and reliable communication with the equipment.

The following are detailed product application areas and functional descriptions without patterns:

1、 Basic Information
Product model: 3M80-001582-16

Product Name: Interface Module

Manufacturer: Tokyo Electron Ltd. (TEL)

Module category: Signal interface and communication management module

2、 Main functions
Signal interface conversion and allocation

Responsible for the conversion and adaptation between different signal types (such as digital signals, analog signals, communication signals);

Manage the signal flow between sensors, actuators, and other modules to ensure correct transmission.

Communication bridge between devices

Connect the main controller with the peripheral submodule to achieve high-speed and stable data exchange;

Support multiple communication protocols and bus standards to ensure coordinated operation within the system.

Electrical protection and signal stability

Provide protection functions such as electrical isolation, overload prevention, and interference prevention;

Ensure signal quality, reduce failure rate and misoperation.

Diagnosis and maintenance support

Equipped with status indicator lights and self diagnostic interfaces, it facilitates monitoring of operational status and troubleshooting.

3、 Typical application areas
Etcher equipment
Signal interface connecting gas control system, vacuum control system and main control unit;

Chemical Vapor Deposition Equipment (CVD/ALD)
Manage signal interfaces for reaction gas pathways and temperature control modules;

Photolithography pre-processing and post-processing equipment
Coordinate the input and output signals of equipment such as robotic arms and positioning systems;

Wafer Handling and Transport System (EFEM, Load Port)
Connect sensors and drivers to achieve action signal transmission.

Product details picture:

3M80-001582-16

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