TEL Tokyo Electron 3M80-002731-12 Controller Module

Brand:TEL Tokyo Electron
Model:3M80-002731-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3M80-002731-12 Controller Module

Product manual:

Product model: 3M80-002731-12
Name: Controller Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Component Category: Main Control Unit/Control Module

1、 Product Overview:
The 3M80-002731-12 controller module is the core control component in TEL (Tokyo Electron) semiconductor manufacturing equipment,
Usually used to manage process flow, monitor equipment status, and coordinate the operation of various subsystems.
This module has high-speed processing capability, real-time response control, and multi interface communication capability, and is the "brain" of the entire system operation.

2、 Main functions:
Function Description
Process control and execution of semiconductor equipment processing flow (such as etching, cleaning, deposition, etc.)
Real time collection and processing of data from sensors and I/O modules for computation and processing
Communication coordination and upper computer HMI、 Communication between human-machine interface or other control modules
Security and alarm management detect abnormal states of equipment, promptly issue alarm signals, and take protective measures
Interface management provides standardized interfaces for connecting with peripherals, actuators, valves, motors, etc

3、 Technical parameters (referring to the design of similar TEL controller modules):
Project Parameters (Speculative)
Embedded ARM or x86 architecture processor with processor architecture
Storage capacity: Flash+RAM, used for program storage and data caching
The power input is generally 24V DC
Communication interface RS-232/RS-485, Ethernet, CAN or TEL dedicated bus
Installation method: Rack mounted card, supports hot swapping (some models)

4、 Typical application devices (may be applicable):
TEL Clean Track series (used for pre - and post lithography cleaning treatment)

TEL PVD/CVD series (thin film deposition equipment)

Other TEL manufacturing platforms that support modular control