TEL Tokyo Electron 3M80-002734-12 Processor Module

Brand:TEL Tokyo Electron
Model:3M80-002734-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3M80-002734-12 Processor Module

Product manual:

Product model: TEL Tokyo Electron 3M80-002734-12
type: Processor Module
Functional positioning: The core computing and control unit of semiconductor manufacturing equipment, responsible for executing system operations and coordinating equipment control

1、 Product Function Overview:
3M80-002734-12 is an embedded processor module designed by Tokyo Electron (TEL) and widely used in various semiconductor devices. This module is responsible for executing the control program of the device,
Process data from sensors and I/O modules, generate control signals to drive process execution units,
Realize automated control of equipment and precise process management.

2、 Main application areas:
Semiconductor process equipment main control processing

Applied to CVD, PVD, plasma etching, diffusion furnaces, cleaning equipment, etc,
As the central control unit, manage the process flow and equipment actions.

Process Management and Calculation

Run embedded control software to process complex process parameters and adjust the process environment in real-time
(Temperature, pressure, gas flow rate, etc.).

Signal acquisition and feedback control

Process various sensor signals returned by I/O modules, perform data analysis, and provide feedback control instructions,
Ensure process stability.

Equipment subsystem coordination and communication

Communicate with other modules (such as I/O interface board, communication module, display terminal),
Realize overall coordination and information synchronization of equipment.

Equipment status monitoring and maintenance support

Record equipment operating status and fault logs, support remote diagnosis and maintenance, and improve equipment reliability.