TEL Tokyo Electron 3M81-001116-12 Motor Unit Distribution Board

Brand:TEL Tokyo Electron
Model:3M81-001116-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3M81-001116-12 Motor Unit Distribution Board

Product manual:

Product Name:
TEL Tokyo Electron 3M81-001116-12 Motor Unit Distribution Board
（Motor Unit Distribution Board）

Product Features:
This circuit board serves as a distributed connection and signal management module in the motor control system, mainly responsible for:

Reception and distribution of motor control signals

Power and feedback interface connection of the driving unit

Summary of motor status monitoring signals

Data allocation and relay transmission of operating parameters such as current and voltage

Main application areas:
1. Wafer handling system
Suitable for controlling multiple motors in wafer transfer modules, such as robotic arms, slide tables, and lifting shafts.

Manage the operation status of multi axis motors to achieve synchronous or sequential control.

2. Automatic alignment and adjustment platform
Used in conjunction with stepper motors/servo motors to perform precise displacement operations.

Support the allocation of control channels such as XY platform, Z-axis lifting, and rotation axis.

3. Internal multi motor system management of equipment
Manage distributed connections of multiple motors and unify power supply and signal interfaces.

Provide functions such as power isolation, interface protection, and motor interlocking.

4. Drive the actuator inside the vacuum chamber
Control the vacuum valve driver, lifting platform, conveyor slide and other components inside the chamber.

Capable of anti-interference and high reliability signal transmission.

Typical equipment used:
TEL Tokyo Electron vacuum etching equipment (Etcher)

Chemical Vapor Deposition System (CVD)

Wafer Handling Robot System

Automatic loading/unloading system (Load Port/FOUP Handler)