TEL Tokyo Electron 3M81-004199-11 Digital Input Module

Product manual:

TEL Tokyo Electron 3M81-004199-11 Digital Input Module
It is a DI (Digital Input) acquisition module used in semiconductor devices,
The main function is to collect and transmit the switch signals of on-site equipment (such as sensors, buttons, limit switches, etc.) to the main control system.
This module plays a crucial role in "state detection" in equipment automatic control and is an important foundation for equipment logic control.

1、 Basic Product Information
Model: 3M81-004199-11

Name: Digital Input Module

Manufacturer: Tokyo Electron Ltd. (TEL)

Purpose: Collect external switch status signals and transmit them to the equipment control system

2、 Core functions
Digital signal acquisition

Read binary signals from on-site devices (such as ON/OFF, High/Low).

Communicate with the main control unit

Upload the collected status signals in real-time to the CPU module or PLC system.

Electrical isolation protection

Each input port usually has optocoupler isolation function to improve the system's anti-interference performance and electrical safety.

Used for logical judgment and control decision-making

Implement functions such as safety interlocking, status judgment, and process control through logical programming.

3、 Application Fields
This module is widely used in various semiconductor devices of TEL, and typical usage scenarios include:

1. Monitoring of equipment mechanical structure
Check the status of door cover switch, cabin locking, locator in place, and completion of handling mechanical actions.

2. Gas and liquid system status feedback
Read valve switch status, gas flow path switching signal, pressure switch trigger status, etc.

3. Safety and fault interlocking
Collect input signals such as safety doors, emergency stop switches, and abnormal alarm contacts to form a protection mechanism.

4. Control process driven basis
As a trigger input source for device start/stop, step transition, and automatic operation logic.

Product details picture:

3M81-004199-11

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