TEL Tokyo Electron 3M81-019772-11 Controller Module

Brand:TEL Tokyo Electron
Model:3M81-019772-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3M81-019772-11 Controller Module

Product manual:

1、 Product functional positioning
The 3M81-019772-11 controller module is the core control unit in Tokyo Electron semiconductor equipment,
Responsible for logical control of equipment, data processing, and coordination of the operation of various subsystems.
This module serves as the brain of the control system, executing program instructions and processing sensor data,
Output control signals to ensure equipment automation and precise operation.

2、 Main application areas
1. Main control system for semiconductor manufacturing equipment
Typical equipment:

Plasma Etcher

Chemical Vapor Deposition Equipment (CVD)

Thin film deposition systems (ALD, PVD)

Wafer cleaning and developing equipment

Functional responsibilities:

Real time control of process parameters (temperature, pressure, gas flow rate, power, etc.);

Manage equipment status, coordinate the work of various control units, sensors, and actuators;

Run the process program to ensure the stability and repeatability of the process flow.

2. Equipment automation and closed-loop control core
Data collection and feedback processing: Collect various analog and digital signals, perform data analysis and feedback adjustment, and achieve closed-loop control.

Collaboration with sub modules: Coordinate RF modules, power modules, vacuum systems, temperature control systems, etc. to achieve overall equipment synchronization.

Abnormal detection and security protection: Monitor equipment for abnormal operation, trigger alarms and protective actions to ensure equipment safety.

3. System communication and integration hub
Communication interface: supports data exchange with upper level systems (such as MES, factory automation systems) and remote maintenance systems.

Multi protocol compatibility: may support multiple industrial protocols such as industrial Ethernet, serial communication, fieldbus, etc.

Modular design: supports flexible combination with other control modules and interface boards to meet different process requirements.