TEL Tokyo Electron 3M81-024340-14 Driver Module

Product manual:

TEL Tokyo Electron 3M81-024340-14 Driver Module
（Driver Module）

Product Function Introduction:
3M81-024340-14 driver module
It is a key module used in Tokyo Electron (TEL) semiconductor equipment to drive motors, actuators, or other loads.
It mainly plays a dual role in power output and control logic execution, and is a core component of the action execution layer in equipment automation systems.

The main functions include:

Provide driving current and control pulses for stepper motors, servo motors, or other electric execution units

Receive signals from controllers (such as PLCs or main control boards) to perform start stop, speed, and direction control

Realize high-precision positioning control, support acceleration and deceleration curves and zero return logic

Built in overcurrent, overvoltage, and overtemperature protection to ensure stable operation of the equipment

Collaborate with motion control systems or I/O systems to achieve automated process flow

Main application areas:
1. Wafer handling and alignment system
Drive key components such as wafer handling arms, lifting mechanisms, and rotating tables

Ensure accurate transfer and positioning of wafers between different modules (such as EFEM, load ports, chambers)

2. Precision motion control system
In TEL Etcher, CVD, PVD and other equipment, the driving cylinder, guide rail, and electric slide table are used to achieve process actions

Automatic drive control for loading mechanisms, loading mechanisms, and door control mechanisms

3. Vacuum and gas control equipment
Control the opening and closing action of the vacuum valve

Micro motors or linear actuators in the driving pressure regulating unit

Product details picture:

3M81-024340-14

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