TEL Tokyo Electron 3M81-025137-21 Input/Output Module

Product manual:

TEL Tokyo Electron 3M81-025137-21 Input/Output Module
It is a key electronic module used for signal transmission and control in semiconductor equipment.
It is mainly used to collect external signals and output control commands to various execution devices,
Realize data exchange and automated control between various parts of the device.

1、 Basic Information
Module Name: Input/Output Module

Product model: 3M81-025137-21

Manufacturer: Tokyo Electron Ltd. (TEL)

Module category: I/O interface control board

Application objects: Semiconductor process equipment (Etcher, CVD, Cleaner, Coater/Developer, etc.)

2、 Main functions
Input function

Receive digital or analog signals from external devices such as sensors, switches, detectors, etc;

Used for monitoring process status, gate control status, temperature/pressure alarms, etc.

output function

Send control commands to execution units (such as solenoid valves, relays, indicator lights, heater control units);

Control the start, stop, or interlock execution of various device actions.

Signal conversion and isolation

Realize compatibility between interface standards such as TTL, current loop, and optoelectronic isolation;

Ensure data transmission security and strong anti-interference ability.

Communicate with the main control system

Data communication and instruction exchange with TEL main control systems (such as PLC, IPC, or embedded controllers);

Support system linkage and automatic process control.

3、 Typical application areas
This module can be applied to multiple core equipment systems of TEL:

Dry etching equipment (Etcher)
Control the chamber vacuum door, gas flow switching, alarm interlocking, etc.

CVD/ALD deposition equipment
Manage heating unit control, pre pump start stop, valve switch.

Photolithography coating and developing equipment (Track Systems)
Implement glue head control, exposure controller linkage, and rotation platform limit feedback.

Wafer Transfer Robots
Control interface signals such as robotic arm movements, lifting platforms, and sensor feedback.

Product details picture:

3M81-025137-21

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