TEL Tokyo Electron 3M81-036411-12 Gas Pressure Monitoring Board

Brand:TEL Tokyo Electron
Model:3M81-036411-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

TEL Tokyo Electron 3M81-036411-12 Gas Pressure Monitoring Board

Product manual:

TEL Tokyo Electron 3M81-036411-12 Gas Pressure Monitoring Board
Category: Gas Pressure Monitoring Module/Gas Pressure Monitoring Board
Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview
This gas pressure monitoring board is used in semiconductor manufacturing equipment, mainly to achieve real-time monitoring and feedback of pressure in the gas supply system. Its functions include:

Collect pressure signals from gas pipelines or tanks

Real time monitoring and status judgment of pressure values

Transmit pressure status signals to the main control system or safety interlock module

Realize overpressure and undervoltage alarm and automatic protection linkage

Support multiple pressure sensor inputs and provide multi-point monitoring

2、 Typical application areas
gas supply system

Monitor the pressure conditions of process gases, auxiliary gases, cleaning gases, etc

Ensure the stability and safety of gas flow control

Vacuum and Inert Gas Protection System

Monitor the inlet and outlet pressure of the vacuum pump to prevent gas leakage or vacuum damage

Valve and flow controller protection

Linkage gas valve switch to prevent equipment failure caused by abnormal pressure

Process safety interlock

Realize automatic gas cut-off or alarm in case of abnormal pressure, ensuring the safety of equipment and personnel

3、 Technical characteristics
Multi channel pressure signal input, compatible with multiple types of pressure sensors (such as analog voltage and current signals)

Real time data acquisition and digital signal output

Built in overvoltage and undervoltage threshold setting and alarm function

Reliable electrical isolation and anti-interference design, suitable for clean room environment

Compatible with TEL device control system interface, supporting on-site maintenance and calibration