TEL Tokyo Electron 3M87-021476-12 Gas System

Product manual:

TEL Tokyo Electron 3M87-021476-12 Gas System
It is a key subsystem in the semiconductor manufacturing equipment of Tokyo Electronics (TEL),
Responsible for controlling and managing the supply, flow regulation, and safety monitoring of various gases required for the process,
Ensure the stability and safety of the production process.

1、 Product Overview
Project Content
Product Name: Gas System
Product model 3M87-021476-12
Manufacturer Tokyo Electron Ltd
Functional positioning: gas supply, flow control, and safety monitoring

2、 Core functions
Gas supply management

Responsible for delivering high-purity process gas to the equipment process chamber as required;

Supports multiple gas types, such as nitrogen, hydrogen, argon, etc.

Flow regulation and control

Accurately control the gas flow rate to ensure the stability of process parameters;

Equipped with flow meters, valves, and regulators to achieve automatic adjustment.

Security protection mechanism

Monitor gas pressure, leaks, and abnormal conditions to ensure equipment and operational safety;

Equipped with an alarm system to promptly respond to emergency situations.

3、 Application Fields
Gas management for processes such as etching, deposition, and cleaning in semiconductor manufacturing;

Gas mixing and distribution control in the process flow;

An important component of the overall security system of the equipment.

Product details picture:

3M87-021476-12

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