TEL Tokyo Electron 3M87-021634 Control Unit Components

Product manual:

Product model: 3M87-021634
Manufacturer: Tokyo Electron Ltd. (TEL)
Component type: subsystem control component/electronic control module assembly

1、 Function Introduction
The control unit component is an integrated control module in TEL semiconductor equipment, which may be composed of one or more circuit boards (such as control board, I/O board, driver board) combined and installed in a specific control box or module area, mainly used for:

Control and coordinate the operation of a specific area or subsystem of equipment

Manage signal input/output, power switch, action execution, etc

Implement local logic judgment, sensor feedback processing, and linkage control

Interconnected with the main system (such as the main control CPU board) through communication interfaces

2、 Typical application scope
Etch/CVD/ALD control unit
Control gas valves, heaters, RF adapters, vacuum systems, and other components.

Wafer Transfer Arm/Load Port System
Manage the collaborative operation of robotic arm movements, lifting platforms, and position sensors.

Vacuum system or Loadlock control module
Control the start stop of vacuum pump, pressure monitoring, solenoid valve switching, etc.

Liquid supply and cleaning module
Control the operation process of DI water, chemical solution, blow drying, etc.

3、 Technical characteristics (refer to the general structure of TEL control components)
Composed of multiple functional boards, uniformly installed on a metal casing or bracket

Equipped with standard industrial connectors (D-sub, AMP, Hirose, MIL connectors, etc.)

Support multiple digital input/output and analog signal processing

Some may contain relays, power regulation, and status indicator units

Hot swappable or modular maintenance, high replacement efficiency

4、 Applicable device platform (speculated)
This component may be applied in the following TEL series, depending on the controlled object:

Unity II/Telius/Trias (etching/deposition equipment)

Expediaus/Lithium (Cleaning and Photolithography Assistance)

Alpha 8/Clean Track Series

Product details picture:

3M87-021634

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