TEL Tokyo Electron 3R81-000019-12 Digital Input Card

Product manual:

TEL Tokyo Electron 3R81-000019-12 Digital Input Board/Module
It is a digital signal acquisition module specifically designed for semiconductor manufacturing equipment,
Used to receive switch signals sent by external devices such as sensors, switches, relays, etc.
This card is one of the input channels of the control system, widely used in key tasks such as process control, equipment status monitoring, and safety interlocking.

1、 Basic Information
Product model: 3R81-000019-12

Product Name: Digital Input Module

Manufacturer: Tokyo Electron Ltd. (TEL)

Function category: I/O control submodule (input class)

2、 Core functions
Collect switch signals

Receive binary input states such as "on/off", "in place/not in place", "with/without signal", etc.

Communicate with the main control system

Real time communication with TEL control system (such as CPU module or PLC system) through bus interface, uploading collected status data.

Support multi-channel input

Support multiple input channels (such as 8, 16, 32) to achieve status monitoring of multiple on-site devices.

Electrical isolation design

Isolation technologies such as optocouplers are used between channels to enhance anti-interference capabilities and equipment electrical safety.

3、 Typical application areas
Semiconductor equipment status feedback

Applied in CVD, Etcher, Track and other systems, it is used to detect on-site signals such as door status, valve switch, pump operation, and liquid level in place.

Handling and mechanical system monitoring

Monitor the position of executing components such as robotic arms, platforms, and slides to ensure safe operation.

Interlocking and protection system

Used to connect emergency stop buttons, safety door switches, and alarm contacts to achieve equipment interlocking and safe shutdown control.

Process control trigger

As an input source for logical control processes, it is used to trigger or interrupt specific action sequences.

Product details picture:

3R81-000019-12

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