TEL Tokyo Electron 3R81-000037-1 Single Board Computer
Brand:TEL Tokyo Electron
Model:3R81-000037-1
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 3R81-000037-1 Single Board Computer
Product manual:
Product Name: 3R81-000037-1 Single Board Computer (SBC)
Manufacturer: Tokyo Electron Ltd
Product Type: Industrial Single Board Computer (Industrial Control Core Board)
1、 Product Overview
3R81-000037-1 is an industrial grade embedded single board computer (SBC) used in Tokyo Electron (TEL) semiconductor equipment
To perform tasks such as local logic control, device data processing, and human-computer interaction interface driving,
It is one of the core processing units of the equipment control system.
2、 Core functions
Local processing and control
Run embedded operating systems (such as embedded Linux or VxWorks) or real-time control programs to execute process control logic.
Multiple communication interfaces
Provide multiple communication interfaces such as serial port (RS-232/485), USB, Ethernet, TTL, GPIO, etc., for connecting with PLCs, I/O boards, actuators, or sensors.
Equipment data collection and computation
Collect and process data from on-site equipment (such as temperature, vacuum, flow rate, position) to adjust or record process parameters.
System Management and Diagnosis
Support self checking function, abnormal log recording, and status LED indication, which helps with fault location and maintenance.
3、 Typical application scope
3R81-000037-1 single board computer is suitable for serving as the control core role in the following equipment systems of Tokyo Electron:
Etcher main control unit
CVD/PVD thin film deposition system main control processing board
Wafer transfer system, alignment system
Vacuum control subsystem
Data Collection and Feedback Processing Module in Coater/Developer
Product details picture:

3R81-000037-1
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