TEL Tokyo Electron 3S80-00007-11 Turbocharging Pump

Product manual:

1、 Product functional positioning
3S80-00007-11 Turbo Molecular Pump (TMP)
It is one of the core components used to maintain a vacuum environment in Tokyo Electron semiconductor equipment.
It is usually used in medium to high vacuum sections and has a high-speed rotating impeller structure,
Suitable for vacuum processes that require extremely high cleanliness and stability.

2、 Main application areas
1. Vacuum system of semiconductor vacuum processing equipment
Core function: To provide a medium to high vacuum environment for wafer processing chambers (such as etching chambers, CVD chambers, PVD chambers, etc.);

Target vacuum range: 10 ⁻³ Pa to 10 ⁻⁶ Pa;

Typical equipment:

Plasma etching equipment (Etcher)

Atomic Layer Deposition (ALD) System

Chemical Vapor Deposition (CVD)

Metal Organic Chemical Vapor Deposition (MOCVD)

2. Maintenance of High Cleanliness Process Environment
Oil free structure: The turbo molecular pump does not use lubricating oil, eliminating oil pollution and suitable for ultra clean environments;

Low vibration/low noise: suitable for sensitive process operations such as thin film deposition, ion implantation, vacuum annealing, etc;

Reaction control: provides a stable vacuum foundation for high-precision temperature control and airflow control.

3. Pressure control of wafer handling and loading system
Loading and unloading platform application: used for rapid vacuuming in areas such as FOUP opening/closing and vacuum transfer arms;

Stable pressure between vacuum chambers: Maintain consistent chamber pressure during wafer transfer to avoid particle contamination.

4. Packaging and microsystem manufacturing equipment
MEMS/packaging technology: used for creating vacuum environments in cavity packaging (such as transistors, optoelectronic devices, etc.);

Small and efficient pump system: TEL uses compact turbocharged pumps as a local vacuum solution in some advanced packaging equipment.

Product details picture:

3S80-000007-11

More related products:

5SHX1445H0001Lowvoltapowersupplychip

6ES7307-1KA02-0AA0powersupplymodule

531X307LTBAFG1 Ethernet module

More product recommendations:

Radisys EPC-3307 processor board

DSAI160 Digital Input Module

ASEA DSMC110 Control Board