TEL Tokyo Electron 3S80-00007-11 Turbocharging Pump
Brand:TEL Tokyo Electron
Model:3S80-000007-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 3S80-00007-11 Turbocharging Pump
Product manual:
1、 Product functional positioning
3S80-00007-11 Turbo Molecular Pump (TMP)
It is one of the core components used to maintain a vacuum environment in Tokyo Electron semiconductor equipment.
It is usually used in medium to high vacuum sections and has a high-speed rotating impeller structure,
Suitable for vacuum processes that require extremely high cleanliness and stability.
2、 Main application areas
1. Vacuum system of semiconductor vacuum processing equipment
Core function: To provide a medium to high vacuum environment for wafer processing chambers (such as etching chambers, CVD chambers, PVD chambers, etc.);
Target vacuum range: 10 ⁻³ Pa to 10 ⁻⁶ Pa;
Typical equipment:
Plasma etching equipment (Etcher)
Atomic Layer Deposition (ALD) System
Chemical Vapor Deposition (CVD)
Metal Organic Chemical Vapor Deposition (MOCVD)
2. Maintenance of High Cleanliness Process Environment
Oil free structure: The turbo molecular pump does not use lubricating oil, eliminating oil pollution and suitable for ultra clean environments;
Low vibration/low noise: suitable for sensitive process operations such as thin film deposition, ion implantation, vacuum annealing, etc;
Reaction control: provides a stable vacuum foundation for high-precision temperature control and airflow control.
3. Pressure control of wafer handling and loading system
Loading and unloading platform application: used for rapid vacuuming in areas such as FOUP opening/closing and vacuum transfer arms;
Stable pressure between vacuum chambers: Maintain consistent chamber pressure during wafer transfer to avoid particle contamination.
4. Packaging and microsystem manufacturing equipment
MEMS/packaging technology: used for creating vacuum environments in cavity packaging (such as transistors, optoelectronic devices, etc.);
Small and efficient pump system: TEL uses compact turbocharged pumps as a local vacuum solution in some advanced packaging equipment.
Product details picture:

3S80-000007-11
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