TEL Tokyo Electron 3T81-000051-11 Circuit Board

Product manual:

1、 Basic Information
Product model: 3T81-000051-11

Product Name: Circuit Board/PCB

Manufacturer: Tokyo Electron Ltd

Component type: Control or interface circuit board

Applicable equipment: commonly used in TEL semiconductor process equipment,
Such as etching equipment (Etcher), chemical vapor deposition equipment (CVD), cleaning equipment, wafer handling systems, etc.

2、 Functional positioning
Signal processing and interface conversion

Used for signal transmission, level matching, filtering, or isolation between different modules.

Subsystem Control Assistance

It can serve as a bridge board between the main control module and the actuator, such as for valve control, relay drive, sensor feedback processing, etc.

Data Communication and Relay

Implement signal distribution and channel scheduling between the main controller and multiple peripheral modules.

Equipment operation status monitoring

Status indicator lights, alarm circuits, or feedback detection functions may be integrated on the circuit board.

3、 Application Fields
Vacuum chamber control system: such as monitoring air pressure, electrode status, plasma generator interface, etc

Gas delivery and flow control system: connected to mass flow meters (MFCs), solenoid valves, etc

Temperature control or heating system: connect thermocouples, heating elements, or cooling fans

Safety interlock and alarm system: used to control door lock status, temperature/pressure upper limit alarm

4、 Technical characteristics (typical)
Multi layer PCB structure, supporting mixed analog/digital signals

Optoelectronic isolation design enhances anti-interference performance

Plug in or backplane connection for modular replacement

Compatible with TEL dedicated control architecture and standard interfaces

Industrial grade materials, supporting 24/7 working environment, high temperature resistance and anti-static

Product details picture:

3T81-000051-11

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