TEL Tokyo Electron 3Z39-000005-V1 Automatic Matcher

Brand:TEL Tokyo Electron
Model:3Z39-000005-V1
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3Z39-000005-V1 Automatic Matcher

Product manual:

product type
RF Auto Matcher

Equipment functions
This module is used in Tokyo Electron semiconductor equipment, mainly for:

Performing automatic impedance matching in high-frequency RF systems

Ensure optimal impedance between RF transmitter and plasma load

Reduce reflection power and improve energy coupling efficiency

Protect key components such as RF transmitters, plasma chambers, and matching networks

Typical applications
Suitable for etching, CVD, ALD and other process systems of Tokyo Electron,
Usually used in conjunction with RF power supplies from brands such as Daihen. Commonly seen in:

Clean Track System

Plasma control module inside the vacuum chamber

RF control scenarios that require high-speed response

Technical parameters (possibly corresponding to Daihen RMN-20K3-V)
Operating frequency: 13.56 MHz or other high-frequency industry standards

Power support range: up to 20kW (depending on version)

Automatic control: equipped with real-time feedback matching algorithm

Interface standard: Industrial standard RF interface, can be integrated with TEL original or third-party RF systems